Spring 2005
Instructor: Prof. Shalom Wind
Department of Electrical Engineering

Course Description: This course is designed to provide a comprehensive understanding of the technologies used for structuring matter at the nanometer scale (approximately 100 nm and below). Different approaches for creating nanostructures and nanodevices, including “top down” and “bottom up” techniques, will be covered, with a discussion of the capabilities and limits of each. Students will learn the fundamental physics, chemistry and material science of nanofabrication, as well as the practical aspects of the creative process of building functional structures at the nanoscale. Topics covered in the course will include: Thin film technology; lithographic patterning concepts and materials; lithography technologies, including photon, electron, ion and atom, scanning probe, “soft lithography” and nanoimprinting; pattern transfer; self-assembly; process integration; characterization; and applications. Each topic will be explored in terms of the underlying physics, chemistry and material science, how the various fabrication technologies are used, what their physical limitations are and why, and how they may be combined to build functional structures and devices.

Who should take this course: This graduate level course is intended for students in both the School of Engineering and the School of General Studies who are interested in or are already engaged in the study of nanostructures and nanodevices. In particular, for those students whose graduate research involves nanofabrication, this course will provide the formal knowledge of the techniques and technologies that are required to execute their projects. By taking this course, students will develop a deeper familiarity and understanding of the tools and techniques available to them to progress in their research. In addition, as Nanotechnology becomes more and more prominent in the commercial world and in society, a comprehensive grasp of the science and technology of nanofabrication will be of significant value in understanding the impact and the potential of this new field as it continues to evolve, and it will offer students the opportunity to participate actively in the growth of this new field.

Prerequisites: ELEN E3106 and ELEN E3401 or equivalent.
Although not required, the courses ELEN E4944 (Introduction to Semiconductor Processing) and MSAE E6090x / APPH E6090x (Nanotechnology) provide helpful background.

Textbook: None (Reading material will be provided)

Grades will be based upon homework assignments, a midterm exam and a final paper.

E6945 in the Columbia University Directory of Classes