Fall 2004
Instructor: Prof. James Yardley
Center for Integrated Science and Engineering

Course description: This course is intended to provide a general introduction to semiconductor processing technology. The course is primarily descriptive, but includes enough quantitative aspects to provide the student some understanding for the practical aspects. The lectures are power point presentation style with extensive graphical materials and are also available on-line. Visits to the CEPSR clean room are included in the course. This should be of interest not only to electrical engineering students but also to students of mechanical engineering and other fields where microfabrication is important.

Prerequisites: This course is taught at the first-year graduate level in Electrical Engineering, but should be accessible to advanced undergraduates and graduate students in other fields. Students enrolled in this course should be comfortable with basic physics (mechanics and electromagnetics) and introductory chemistry (physical chemistry). Solid State Physics and basic Semiconductor Device courses are not necessary, but will be useful. Course is relatively qualitative.

Textbook: Microchip Manufacturing. S. Wolf, Lattice Press, 2004.

Reference: Silicon VLSI Technology: Fundamentals, Practice, and Modeling. James D. Plummer, Michael D. Deal, and Peter B. Griffen Prentice Hall, 2000.

G4944 in the Columbia University Directory of Classes