Optical Diagnostics for Thin Film Processing 


 



Table of Contents

  1. Overview of Optical Diagnostics
  2. The Properties of Light
  3. The Structure of Matter
  4. Interactions of Light with Matter for Spectroscopy
  5. Diagnostics Equipment and Methods
  6. Optical Emission Spectroscopy
  7. Laser-Induced Fluorescence
  8. Transmission (Absorption)
  9. Reflection
  10. Interferometry and Photography
  11. Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry)
  12. Raman Scattering
  13. Pyrometry
  14. Photoluminescence
  15. Spectroscopies Employing Laser Heating
  16. Nonlinear Optical Diagnostics
  17. Optical Electron/Ion Probes
  18. Optical Thermometry
  19. Data Analysis and Process Control