
Herman Group Publications
88."Infrared Reflection Spectroscopy of as-Anodized and Passivated 6H and 4H Porous Silicon Carbide,"
J. E. Spanier and I. P. Herman, Mater. Res. Soc. Symp. Proc. 486, 371 (1998).
87. "Real-Time Monitoring of the Etching of GaAs(100) by Surface Photoabsorption,"
H. Fang, J. Eng, Jr., C. Su, S. Vemuri, I. P. Herman, and B. E. Bent, Langmuir 14, 1375 (1998).
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86. "Analysis of the Etching of Silicon in an Inductively Coupled Chlorine Plasma using Laser Thermal Desorption,"
J. Y. Choe, I. P. Herman, and V. M. Donnelly, J. Vac. Sci. Technol. A 15, 3024 (1997).
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85. "Optical Anisotropy of the GaAs(001) Surface,"
R. Eryigit and I. P. Herman, Phys. Rev. B 56, 9263 (1997).
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84. "Effects of Nanocrystalline Structure and Passivation on the
Photoluminescent Properties of Porous Silicon Carbide," J. E. Spanier,
G. S. Cargill, III, I. P. Herman, S. Kim, D. R. Goldstein, A. D. Kurtz,
and B. Z. Weiss, Mater. Res. Soc. Symp. Proc. 452, 491 (1997).
83. "Isoelectronic Bound-Exciton Photoluminescence in Strained Beryllium-Doped Si0.92Ge0.08 Epilayers and Si0.92Ge0.08/Si Superlattices at Ambient and Elevated Hydrostatic Pressure",
S. Kim, G. Chang, I. P. Herman, J. Bevk, K. L. Moore, and D. G. Hall, Phys. Rev. B 55, 7130 (1997).
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82. "Use of Surface Photoabsorption to Analyze the Optical Response of GaAs(001) Surfaces,"
R. Eryigit, P. K. Marschel, and I. P. Herman, J. Vac. Sci. Technol. A 15, 138 (1997).
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81. "Real-Time Monitoring of GaAs(100) Etching by Surface Photoabsorption,"
J. Eng, H. Fang, C. Su, S. Vemuri, I. P. Herman, and B. E. Bent, Mater. Res. Soc. Symp. Proc. 309, 151 (1996).
80. I. P. Herman, V. M. Donnelly, C.-C. Cheng, and K. V. Guinn,
"Surface Analysis during Plasma Etching by Laser Induced Thermal
Desorption," Jpn. J. Appl. Phys. 35, 2410 (1996)
PDF; shorter version
Proceedings of the 17th Symposium on Dry Process, p. 155 (1995). Also,
V. M. Donnelly, I. P. Herman, C. C. Cheng, and K. V. Guinn, "Surface
Chemistry during Plasma Etching of Silicon," Pure & Appl. Chem. 68,
1071 (1996).
79. "Pattern Transfer and Photoluminescence Damage- Assessment of
Deep-Submicrometer Features Etched by Photon-Induced Cryoetching," M.
B. Freiler, M. C. Shih, S. Kim, M. Levy, I. P. Herman, R. Scarmozzino,
and R. M. Osgood, Jr., Appl. Phys. A 63, 143 (1996).
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78. "Raman Scattering",
I. P. Herman, contribution to the Encyclopedia of Applied Physics, VCH Publishers, New York, Vol. 15, p. 587 (1996).
77. "Hydrostatic Pressure Dependence of Isoelectronic Bound Excitons in Beryllium-doped Silicon,"
S. Kim, I. P. Herman, K. L. Moore, D. G. Hall, and J. Bevk, Phys. Rev. B 53, 4434 (1996).
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76. "Lattice Properties of Strained GaAs and Ge using a Modified Bond Charge Model,"
R. Eryigit and I. P. Herman, Phys. Rev. B 53, 7775 (1996).
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75. "Luminescence Properties of Submicrometer Features Fabricated by
using Magnetron Reactive Ion Etching with Different Sample Biases," M.
B. Freiler, G. F. McLane, S. Kim, M. Levy, R. Scarmozzino, I. P.
Herman, and R. M.Osgood, Jr., Appl. Phys. Lett. 67, 3883 (1995).
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74. "Use of Hydrostatic Pressure to Resolve Phonon Replicalike Features
in the Photoluminescence Spectrum of Beryllium-doped Silicon," S. Kim,
I. P. Herman, K. Moore, D. G. Hall, and J. Bevk, Phys. Rev. B 52, 16309
(1995).
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73. "Optical Thermometry during Semiconductor Processing,"
I. P. Herman, J. Selected Topics in Quantum Electronics 1, 1047 (1995).
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72. "Photoluminescence of Wurtzite GaN under Hydrostatic Pressure,"
S. Kim, I. P. Herman, J. A. Tuchman, K. Doverspike, L. B. Rowland, and K. Gaskill, Appl. Phys. Lett. 67, 380 (1995).
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71. "Competitive Halogenation in HBr/Cl2 Plasmas Studied with X-ray
Photoelectron Spectroscopy and In-Situ, Real-Time, Pulsed Laser-Induced Thermal Desorption,"
C. C. Cheng, K. V. Guinn, I. P. Herman, and V. M. Donnelly,
J. Vac. Sci. Technol. A 13, 1970 (1995).
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70. "Lattice Properties of Ge and GaAs Strained Layers on Si", R. Eryigit, Z. Sui and I. P. Herman, Mat. Res. Soc. Symp Proc. 356, 295 (1995).
69. "Chemical Topography of Si Etching in a Cl2 Plasma, Studied by
X-ray Photoelectron Spectroscopy and Laser-induced Thermal Desorption"
V. M. Donnelly, K. V. Guinn, C. C. Cheng, and I. P Herman, Mat. Res.
Soc. Symp. Proc. 334, 425 (1994).
68. "in situ Pulsed Laser-Induced Thermal Desorption Measurements of
Silicon Chloride Layer Thicknesses During Silicon Etching in High
Density Plasmas of Cl2 and Cl2/O2 Mixtures,"
C. C. Cheng, K. V. Guinn, V. M. Donnelly, and I. P. Herman, J. Vac. Sci. Technol. A 12, 2630 (1994).
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67. "Laser Induced Thermal Desorption as an in situ Surface Probe During Plasma Etching,"
I. P. Herman, V. M. Donnelly, K. V. Guinn, and C. C. Cheng, Phys. Rev. Lett. 72, 2801 (1994).
66. "Epitaxial ZnS, ZnSe and ZnS-ZnSe Superlattices Grown on (001) GaAs
by Pulsed-Laser Ablation," J. W. McCamy, D. H. Lowndes, J. D. Budai, G.
E. Jellison, Jr., I. P. Herman, and S. Kim, Mat. Res. Soc. Symp. Proc.
285, 471 (1993).
65. "Effect of Strain on Phonons in Si, Ge, and Si/Ge Heterostructures,"
Z. Sui and I. P. Herman, Phys. Rev. B 48, 17938 (1993).
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64. "Temperature Dependence of Raman Scattering in Ge-Si Alloys,"
H. H. Burke and I. P. Herman, Phys. Rev. B 48, 15016 (1993).
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63. "Raman Scattering in Germanium-Silicon Alloys under Hydrostatic Pressure,"
Z. Sui, H. H. Burke, and I. P. Herman, Phys. Rev. B 48, 2162 (1993).
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62. "Photoluminescence of ZnSe/ZnMnSe Superlattices under Hydrostatic Pressure,"
J. A. Tuchman, Z. Sui, S. Kim and I. P. Herman, J. Appl. Phys. 73, 7730 (1993).
61. "Exciton Photoluminescence of Bulk ZnSe and ZnSe Epilayers under Hydrostatic Pressure,"
J. A. Tuchman, S. Kim, Z. Sui and I. P. Herman, Phys. Rev. B46, 13371 (1992).
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60. "Analysis of the Structure of Porous Silicon by Raman Scattering,"
Z. Sui, P. P. Leong, I. P. Herman, G. S. Higashi, and H. Temkin, Mat. Res. Soc. Symp. Proc. 256, 13 (1992).
59. "Raman Scattering as an in situ Optical Diagnostic,"
I. P. Herman, SPIE 1594, 298 (1992).
58. "Anomalous Laser Etching of Copper by Chlorine,"
H. Tang and I. P. Herman, Appl. Phys. Lett. 60, 2164 (1992).
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57. "General Trends in Changing Epilayer Strains through the Application of Hydrostatic Pressure,"
J. A. Tuchman and I. P. Herman, Phys. Rev. B45, 11,929 (1992).
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56. "Raman Analysis of Light-Emitting Porous Silicon,"
Z. Sui, P. P. Leong, I. P. Herman, G. S. Higashi, and H. Temkin, Appl. Phys. Lett. 60, 2086 (1992).
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55. "Polarization Raman Microprobe Analysis of Laser Melting and Etching in Silicon,"
H. Tang and I. P. Herman, J. Appl. Phys. 71, 3492 (1992).
54."Raman Study of Strain and Confinement Effects in Si/Ge Strained Layer Superlattices under Hydrostatic Pressure,"
Z. Sui, I. P. Herman, and J. Bevk, Mat. Res. Soc. Symp. Proc. 220, 333 (1991).
53. "Real Time Optical Diagnostics in Laser Etching and Deposition,"
I. P. Herman, H. Tang, and P. P. Leong, Mater. Res. Soc. Symp. Proc. 201, 563 (1991).
52. "Raman Analysis of Si/Ge Strained Layer Superlattices under Hydrostatic Pressure,"
Z. Sui, I. P. Herman, and J. Bevk, Appl. Phys. Lett. 58, 2351 (1991).
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51. "Raman Microprobe Scattering of Solid Silicon and Germanium at the Melting Temperature,"
H. Tang and I. P. Herman, Phys. Rev. B43, 2299 (1991).
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50. "Local Laser Induced Etching of Copper Films by Chlorine," H. Tang and I.P. Herman, Mat. Res. Soc. Symp. Proc. 158, 331 (1990).
49. "Photoluminescence of ZnSe Epilayers on GaAs Under Hydrostatic
Pressure," J.A. Tuchman, Z. Sui, I.P. Herman, R.L. Gunshor, L.A.
Kolodziejski, D.A. Cammack, and M. Shone, Mat. Res. Soc. Symp. Proc.
161, 471 (1990).
48. "CW Laser Doping of Micrometer-Sized Features in GaAs Using a Dimethylzinc Ambient,"
T.J. Licata, D.V. Podlesnik, H. Tang, I.P. Herman, R.M. Osgood, Jr., and S.A. Schwarz, J. Vac. Sci. Technol. A 8, 1618 (1990).
47. "Laser-Induced and Room-Temperature Etching of Copper Films by Chlorine with Analysis by Raman Spectroscopy,"
H. Tang and I. P. Herman, J. Vac. Sci. Technol. A 8, 1608 (1990).
46. "Laser Photochemical Deposition of Germanium-Silicon Alloy Thin Films,"
H. H. Burke, I. P. Herman, V. Tavitian, and J. G. Eden, Appl. Phys. Lett. 55, 253 (1989).
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45. "Laser Deposition of Thin Films from Gas-Phase and Adsorbed Molecules,"
I. P. Herman, Chem. Rev. 89, 1323 (1989).
44. "Thermally Induced Stresses and Strains in Laser Processing of Thin Films,"
J. A. Tuchman, L. P. Welsh, and I. P. Herman, Mat. Res. Soc. Symp. Proc. 130, 333 (1989).
43. "Raman Microprobe Analysis of Temperature Profiles in cw Laser Heated Silicon Microstructures,"
G. D. Pazionis, H. Tang, and I. P. Herman, IEEE J. Quantum Electron. 25, 976 (1989).
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42. "Laser Separation of Tritium", I. P. Herman, K. Takeuchi, and Y.
Makide, chapter in Laser Applications in Physical Chemistry, edited by
D.K. Evans (Marcel Dekker, New York, 1989), p. 173.
41. "Direct-Laser Writing," I. P. Herman, chapter in Laser Chemical
Processing for Microelectronics, edited by K. Ibbs and R. M. Osgood,
Jr., (Cambridge University, London, 1989), p. 61.
40. "The Importance of Thermal Stresses and Strains Induced in Laser Processing with Focused Gaussian Beams,"
L. P. Welsh, J. A. Tuchman, and I. P. Herman, J. Appl. Phys. 64, 6274 (1988).
39. "A Real-Time Monte Carlo Simulation of Thin Film Nucleation in Localized-Laser Chemical Vapor Deposition,"
D. E. Kotecki and I. P. Herman, J. Appl. Phys. 64, 4920 (1988).
38. "Initial Stages of Silicon Growth on the (100) Surface of Silicon by Localized Laser CVD,"
D. E. Kotecki and I. P. Herman, Mat. Res. Soc. Sym. Proc. 101, 119 (1988).
37. "Stokes/Anti-Stokes Raman Microprobe Analysis of Laser- Heated Silicon Microstructures on Silicon Dioxide,"
G. D. Pazionis, H. Tang, L. Ge, and I. P. Herman, Mat. Res. Soc. Sym. Proc. 101, 113 (1988).
36. "Advances in Isotope Separation," I. P. Herman and A. F. Bernhardt,
chapter in Energy in Physics, War and Peace, edited by H. Mark and L.
Wood (Kluwer, Dordrecht, 1988), p. 237.
35. "Nucleation and Growth of Silicon Microstructures by Direct
Laser Writing," D. E. Kotecki and I. P. Herman, in Photon, Beam and
Plasma Stimulated Chemical Processes at Surfaces, edited by V. M.
Donnelly, I. P. Herman, and M. Hirose, (MRS, Pittsburgh, 1987), p. 65.
34. "Ge-Si Alloy Microstructure Fabrication by Direct-Laser Writing with Analysis by Raman Microprobe Spectroscopy,"
I. P. Herman and F. Magnotta, J. Appl. Phys. 61, 5118 (1987).
33. "Direct-Laser Writing of Silicon Microstructures: Raman Microprobe
Diagnostics and Modeling the Nucleation Phase of Deposition," I. P.
Herman, F. Magnotta, and D. E. Kotecki, J. Vac. Sci. Technol. A 4, 659
(1986).
32. "Raman Microprobe Analysis During the Direct-Laser Writing of Silicon Microstructures,"
F. Magnotta and I. P. Herman, Appl. Phys. Lett. 48, 195 (1986).
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31. "Observations on the Spectral Dependence and T/D Isotope Selectivity in the CO2 Laser Multiple-Photon Dissociation of Trifluoromethane,"
F. Magnotta and I. P. Herman, Appl. Phys. B 36, 207 (1985).
30. "Laser Fabrication of Integrated Circuits,"
I. P. Herman, in Laser Processing and Diagnostics (Chemical Physics 39) (Springer, 1984), p. 396.
29. "Infrared Laser Multiple-Photon Dissociation of CTCl3: Wavelength Dependence, Collisional Effects, and Tritium/Deuterium Isotope Selectivity,"
F. Magnotta and I. P. Herman, J. Chem. Phys. 81, 2363 (1984).
28. "Wafer-Scale Laser Pantography: VI. Direct-Write Interconnection of VLSI Gate Arrays," B. M. McWilliams, H. W. Chin, I. P. Herman, R. A. Hyde, F. Mitlitsky, J. C. Whitehead, and L. L. Wood, Proc. of the SPIE/LA '84 Symposium , 459, 49 (1984).
27. "Laser Separation of Hydrogen Isotopes: Tritium from Deuterium Recovery," F. Magnotta, F. T. Aldridge, I. P. Herman and J. L. Maienschein, Proc. of the Int'l. Conf. on Lasers '83 (STS Press, 1984).
26. "Wafer-Scale Laser Pantography IV: Physics of Direct Laser-Writing Micron- Dimension Transistors," I. P. Herman, B. M. McWilliams, F. Mitlitsky, H. W. Chin, R. A. Hyde and L. L. Wood, Proc. of the Materials Research Society 1983 Annual Meeting, Volume 29 (North Holland, 1984), p. 29.
25. "The Status of the Photochemistry and Photophysics of Tritium-from-Deuterium Isotope Separation by Infrared Laser Multiple-Photon Dissociation of Chloroform," I. P. Herman, F. Magnotta, and F. T. Aldridge, Israel J. Chem. 24, 192 (1984).
24. "Tritium Removal from Contaminated Water via Infrared Laser Multiple-Photon Dissociation,"
J. L. Maienschein, F. Magnotta, I. P. Herman, F. T. Aldridge, and P. Hsiao, Nuclear Fusion/Technology 4, 121 (1983).
23. "Wafer-Scale Pantography: Fabrication of n-Metal-Oxide-
Semiconductor Transistors and Small-Scale Integrated Circuits by
Direct-Write Laser-Induced Pyrolytic Reactions," B. M. McWilliams, I.
P. Herman, F. Mitlitsky, R. A. Hyde, and L. L. Wood, Appl. Phys. Lett.
43, 946 (1983).
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22. "Infrared Laser Multiple-Photon Dissociation of CDCl3 in a Molecular Beam,"
I. P. Herman, F. Magnotta, R. J. Buss, and Y. T. Lee, J. Chem. Phys. 79, 1789 (1983).
21. "The Qualitative Effects of Laser Irradiation on Human Arteriosclerotic Disease,"
G. Lee, R. Ikeda, R. M. Dwyer, M. Bass, H. Hussein, J. Kozina, D. T. Mason and I. P. Herman, Am. Heart. J. 105, 885 (1983).
20. "Wafer-Scale Lithography: I. Pyrolytic Deposition of Metal Microstructures,"
I. P. Herman, R. A. Hyde, B. M. McWilliams, A. H. Weisberg, and L. L. Wood, Mater. Res. Soc. Symp. Proc. 17, 9 (1983).
19. "Two-Frequency CO2 Laser Multiple-Photon Dissociation and Dynamics of Excited State Absorption in CDF3," I. P. Herman, Chem. Phys. 75, 121 (1983).
18. "Highly-Selective Tritium-from-Deuterium Isotope Separation by Pulsed NH3 Laser Multiple-Photon Dissociation of Chloroform,"
F. Magnotta, I. P. Herman, and F. T. Aldridge, Chem. Phys. Lett. 92, 600 (1982).
17. "Infrared Spectrum of CTF3 and Implications toward Tritium Isotope Separation by Infrared Laser Multiple-Photon Dissociation of Halogenated Methanes,"
I. P. Herman and J. B. Marling, J. Phys. Chem. 85, 493 (1981).
16. "Evaluation of Quantum and Photoproduct Yields in Multiple-Photon Dissociation for Isotope Separation," I. P. Herman, J. Appl. Phys. 51, 4483 (1980).
15. "Molecular Hydrogen Exchange: A Study of HD(v=5) + HD(v=0) -> H2 + D2,"
I. P. Herman, J. Chem. Phys. 72, 5777 (1980).
14. "Deuterium Separation at High Pressure by Nanosecond CO2 Laser Multiple-Photon Dissociation,"
J. B. Marling, I. P. Herman, and S. J. Thomas, J. Chem. Phys. 72, 5603 (1980).
13. "Deuterium Separation with 1400-fold Single-Step Isotopic Enrichment and High Yield by CO2-Laser Multiple- Photon Dissociation of 2,2-dichloro-1,1,1-trifluoroethane,"
J. B. Marling and I. P. Herman, Appl. Phys. Lett. 34, 439 (1979)
12. "Calculation of Fluence-Dependent Dissociation Probabilities in Infrared Multiple-Photon Photolysis,"
I. P. Herman, Opt. Lett. 4, 403 (1979).
11. "Vibrationally Stimulated Addition Reactions between Hydrogen Halides and Unsaturated Hydrocarbons: A Negative Result,"
I. P. Herman and J. B. Marling, J. Chem. Phys. 71, 643 (1979).
10. "IR Photolysis of CDF3:
A Study in Kinetics of Multiple-Photon Dissociation with Applications to Deuterium Separation,"
I. P. Herman and J. B. Marling, Chem. Phys. Lett. 64, 75 (1979.
9. "Deuterium Separation with 1400-fold Single-Step Isotopic Enrichment and High Yield by CO2-Laser Multiple- Photon Dissociation of 2,2-dichloro-1,1,1-trifluoroethane,"
J. B. Marling and I. P. Herman, Appl. Phys. Lett. 34, 439 (1979).
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8. "XeF Ground-State Dynamics in a Laser Discharge,"
S. F. Fulghum, I. P. Herman, M. S. Feld and A. Javan, Appl. Phys. Lett. 33, 926 (1978).
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7. "Observation of Infrared-Optical Double Resonance in NO2,"
I. P. Herman, A. Javan and R. W. Field, J. Chem. Phys. 68, 2398 (1978).
6. "Analysis of the Laser-Stimulated Reaction: NO2* + CO -> NO + CO2,"
I. P. Herman, R. P. Mariella, Jr. and A. Javan, J. Chem. Phys. 68, 1070 (1978).
5. "The Laser-Initiated Reaction: NO2* + CO -> NO + CO2," I. P. Herman, R. P. Mariella, Jr. and A. Javan, J. Chem. Phys. 65, 3792 (1976).
4. "Self-Induced Emission in Optically Pumped HF Gas: The Rise and Fall of the Superradiant State," I. P. Herman, J. C. MacGillivray, N. Skribanowitz and M. S. Feld, Proc. of the Vail Conf. on Laser Spectroscopy, (Plenum, 1974).
3. "Observation of Dicke Superradiance in Optically Pumped HF Gas," N. Skribanowitz, I. P. Herman, J. C. MacGillivray and M. S. Feld, Phys. Rev. Lett. 30, 309 (1973).
2. "Laser Oscillation and Anisotropic Gain in the 1->0 Vibrational Band of Optically Pumped HF Gas,"
N. Skribanowitz, I. P. Herman, and M. S. Feld, Appl. Phys. Lett. 21, 466 (1972).
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1. "Anisotropic Ultrahigh Gain emission Observed in Rotational Transitions in Optically Pumped HF Gas,"
N. Skribanowitz, I. P. Herman, R. M. Osgood, Jr., M. S. Feld and A. Javan, Appl. Phys. Lett. 20, 428-431 (1972).
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"Optical Diagnostics for Thin Film Processing", (Academic Press, San Diego, 1996).